Institute for Integrated Micro and Nano Systems (Technology Research) (IMNS)

The Institute for Integrated Micro and Nano Systems has technology research projects in a number of areas that range from the fabrication of deep sub-micron MOS devices through to microsystem technology which includes projects aimed at improving the manufacturing efficiency of silicon fabrication plants. The Institute staff whose are mainly associated with technology are located in the Scottish Microelectronics Centre, a £4.2M purpose built building with 350m2 of class 10 cleanrooms and associated laboratory space. The cleanroom is fully equipped with standard microelectronic microfabrication equipment including measurement equipment (MIAC) and state-of-the-art simulation software, The Institute for Integrated Micro and Nano Systems has many close links with the IC fabrication industry.
The Department's web server can be searched if you have specific interests but if the information you require cannot be located below please contact Prof A.J. Walton (Anthony.Walton@ee.ed.ac.uk).

Technology Research

• Microelectronic test structures
  • Projects
• Design for Manufacturability (DFM)
• Technology Computer Aided Design (TCAD)
• Lithography
• Miniature Displays
  • Projects
  • Display images are available
• Al and Cu Damascene Metallisation - ACME
• MEMS - Micro-Systems (MST), Sensors and Actuators
• Micro-Cavity Gettering
• Small Geometry Devices
• Selected papers and reports

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