Electronics Teaching

The School of Engineering and Electronics

Development of Test Structures for Characterising IC Technologies

This page gives brief details of some of the test structure work being undertaken at Edinburgh.

Holograms: CD and alignment
Calibration of FIB platinum depositions
Trimming transistors using a FIB system
Mask metrology
Electrical-Based Dimensional Metrology (with NIST)
Organometallic films

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Published by the School of Engineering and Electronics, © 2002 The University of Edinburgh