Institute for Integrated Micro and Nano Systems

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Aluminium Stress Sensors This MEMS device can be used to determine the stress in metal films.  The basic device is shown in figure 1 where the stress in the arms is indicted by the pointer.  Figure 2 shows the test chip used to develop the structures and figure 3 shows an example device.  More details are available from publications Figure 1.  Schematic of the stress sensor Figure 2.  Stress sensor test chip Figure 3.  Al Stress sensor

Institute for Integrated Micro and Nano Systems, The University of Edinburgh, Kings Buildings, Edinburgh, EH9 3JF Tel: 0131 650 7474      Fax: 0131 650 6554