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Electronics Teaching | The School of Engineering and Electronics |
Flexible mirrors for adaptive optic applications have been constructed in silicon with both nitride and polymer membranes. A set of electrode below the membrane are used to activate the mirror.
Electrostatic forces where the stiffness/voltage/gap limiting conditions in a polymer membrane mirror have been exceeded, causing the membrane to be sucked down onto the hexagonal electrodes beneath. The pattern of the electrodes can be observed.
Nitride membrane mirror with aluminium reflector
Packaged nitride membrane mirror with electrodes mounted beneath
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