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Micro-Systems Technology
The INMS has been involved in a
wide range of projects in the area of silicon based micro-machining. The
group's equipment
base is sub-micron CMOS capable and they have significant experience in
post-processing foundry wafers up to 200mm diameters. The technology
research is located in the SMC
(Scottish Microelectronics Centre) which houses 250m2 of class 10 and 80m2
of class 100 cleanrooms.
The following list some of the
project Edinburgh
has been involved with.
- Flexible
MOS devices with IDS (BMDO USA)
- Microhaemorheometer (EPSRC)
- Optical
Multimode waveguides with BA, GEC Marconi, ICI, Epigem (DTI)
- Mono
Dispersed Particles
- ELSTEMS
(EPSRC) with NIST(USA)
- Al
friendly Si etch chemicals for MEMS with SensoNor
(Norway)
- Deformable
Mirrors LOCADO with Imperial
College,
Pilkington Optoelectronics, Spectron Laser
Systems (EPSRC)
- MOSIS
Micro Optical SIlicon Systems with Imperial
College Universitat Neuchatel,
Sektion Angewandte
Optik, Universitat
Stuttgart, Laser- und Medizintechnologie, Fachhochschule Munster - Technische
Optik, Thomson-CSF (EC)
- PACMAN
PACkaging and MANufacturability
of microdisplays - Miniature Displays surface machining (EPSRC)
- CLIMACS
Development of a MEMS Cell Library for Integrated Microsystems, ACtuators and Sensors (CLIMACS) in Silicon with
Strathclyde
- Chem
FETS
- Neurons
on silicon
- Silicon
structures for fungi growth
- MEMS
structures in SiC (with Newcastle)
- Microfluidics
- droplet
movement on electrode arrays
- Drug
delivery
- IR
Bolometer arrays for SCUBA-2
(with NIST, UKATC, Cardiff
and a consortium of Canadian Universities) Home page
- Polysilicon
beams
- Tungsten
filaments
- Al
stress sensor (with Newcastle)
- Si
hinges
- Electrostatic
motors
- Wafer
bonding
- FIB
technology (AFM tips and steel machining)
- Resonant
gate transistors
- RASOR Radical Solutions for
Researching the proteome (With Glasgow
and Dundee)
More web based details of
MEMS/microsystems technologies and equipment located at Edinburgh are available.
Other UK MEMS sites
Links to MEMS related sites
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