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Electronics Teaching | The School of Engineering and Electronics |
These devices are standard structures for electrically measuring linewidth that have been fabricated as a web so that they can be examined using a TEM. A documemt in pdf format describing the full process and the application is available.
General view of ELISTEM structures from the back of the wafers
View of single ELISTEM structures from the back of the wafer
Close up of the ELISTEM tracks viewed from the front of the wafer
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