Services
The Scottish Microelectronics Centre at the University of Edinburgh.
Nikon i-line stepper system for sub-micron photolithography on 200mm substrates
Advanced 200mm cluster tool for thin film deposition
In 2010 the SMC celebrated its 10th anniversary since opening and its cleanroom infrastructure offers a comprehensive toolset for flexible processing of 75 to 200mm silicon wafers. This resource together with the highly skilled staff provides an extensive technology base for microsystems/MEMS and sensor fabrication and their integration with silicon ICs. The equipment, which includes processes such as double sided and i-line wafer stepper lithography, deep etching, wafer bonding as well as sputter, ebeam, LPCVD, PECVD and electroplating deposition. All this technology is available for commercial access and much of it is located in a class 10 environment.
Services on offer include:
Contacts for further information
Professor Anthony J. Walton
Institute for Integrated Systems
Email: Anthony.Walton@ed.ac.uk Tel: 0131 650 5620 Fax: 0131 650 7475 |
Iain Hyslop
Scottish Microelectronics Centre
Email: iain.hyslop@ed.ac.uk Tel: 0131 650 7474 Fax: 0131 650 7475 |
