Research Achievements

A hybrid wireless pondskater that uses an EWOD based propulsion system developed in collaboration with the University of Tokyo

The SMC is probably one of the very few operations in the UK that has sufficient breadth to address the challenges posed by integrating microsystems with industrially relevant 200mm foundry fabricated integrated circuits. The IMNS and the SMC has a tremendous record of exploiting their research creating companies such as Wolfson Microelectronics who have examples of their components incorporated in Nokia mobile phones and the Apple iPod. Underpinning this commercial success is a world class research Institute that provides a pipeline of research topics and ideas for exploitation. SMC/IMNS research highlights include:

• Microdisplays developed and fabricated in the SMC are celebrated in the Guinness Book of Records as the smallest TV screens in the world.
• Much of the early CMOS imaging design and technology was developed by IMNS/SMC staff. The spin-out company was bought up by STMicroelectronics and now forms their Imaging Division.
• The IMNS/SMC was the first group to demonstrate a full colour, miniature FE-LCD display.
• The first demonstration of EWOD (ElectroWetting On Dielectric) droplet movement (a) on foundry CMOS, (b) with RF wireless power transfer. We have recently used this technology to demonstrate the first truly microscale, wireless powered pond skating device.
• The largest and most sensitive (10^-17 W/√Hz) sub-millimetre bolometer array in the world (SCUBA-2: shipped to Hawaii in March 2008 for use on the James Clerk Maxwell Telescope).
  

  An IIS designed and fabricated micro-machined, three-axis accelerometer for heart bypass surgery

• The development of effective reactive ion etch technology for silicon carbide and diamond substrates.

The above achievements provide many of the underpinning technology/processing elements associated with the proposed project. The workplan has a number of novel elements which include the stencil and inkjet printing of newly formulated inks directly onto CMOS, sophisticated devices based on magnetic materials integrated onto CMOS, microfluidics technologies (digital and analogue) directly on CMOS, precision alignment of LEDs on CMOS for optical encoder applications and the integration of sensor technology onto SiC circuitry.

The following links give some details of projects which the IMNS/SMC have been involved with:

• Smart X-ray Optics
• Smart Microsystems
• SCUBA-2 (Bolometer for the JCM Telescope (Hawaii))
• Chronic Wound Care
• Golem - Bioinspired assembly for microelectronics
Rasor (Radical Solutions for Researching the proteome)
• The Centre for Systems Biology at Edinburgh

Sample Publications on ome of the SMC's underpinning technologies

A 96 element heater/sensor array for controlling and monitoring micro-cooling systems

Digital Microfludics

• Y. Li, B. Flynn, W. Parkes, Y. Liu, Y. Feng, A.D. Ruthven, J.G. Terry, L.I. Haworth, A. Bunting, J.T.M. Stevenson, S. Smith, P. Bobbili, Y.Q. Fu, A.J. Walton; "The Integration of EWOD and SAW Technologies for Improved Droplet Manipulation and Mixing", ESSDERC, pp. 373-374, Sept 2009.
• S. Morishita, J.-H. Kim, F. Marty, Y. Li, A.J. Walton, Y. Mita; "A Three-Dimensional Silicon Shadow Mask for Patterning on Trenches with Vertical Walls", Transducers, 2009.
• S. Morishita, J.-H. Kim, F. Marty, Y. Li, A.J. Walton, Y. Mita; "A Three-Dimensional Silicon Shadow Mask for Patterning on Trenches with Vertical Walls", Transducers, 2009.
• A.A. Stokes, Yifan Li, W. Parkes, D.J. Clarke, P. Langridge-Smith, A.J. Walton, C.L. Mackay; "EWOD Digital Microfluidic Platform for Protein Capture and Analysis", 57th ASMS Conference on Mass Spectrometry, 2009.
• J.K. Luo, Y.Q. Fu, Y. Li, X.Y. Du, A.J. Flewitt, A.J. Walton, W.I. Milne; "Moving-part-free microfluidic systems for lab-on-a-chip", J Micromech. Microeng, 2009.
• Y. Mita, Y. Li, M. Kubota, W. Parkes, L.I. Haworth, B.W. Flynn, J.G. Terry, P. Li, T-B. Tang, A.D. Ruthven, S. Smith, A.J. Walton; "Wireless Driven EWOD Technology for a MEMS Pond Skater", ESSDERC, pp. 306-309, Sept 2008.
• Y. Li, Y. Mita, L.I Haworth, W. Parkes, M. Kubota, A.J. Walton; "Test Structure for Characterising Low Voltage Coplanar EWOD System", IEEE International Conference on Microelectronics Test Structures, pp. 80-85, March 2008.
• Y. Li, W. Parkes, L.I. Haworth, A.W.S. Ross, J.T.M. Stevenson, A.J. Walton; "Room Temperature Fabrication of Anodic Tantalum Pentoxide for Low Voltage Electro-Wetting on Dielectric (EWOD)", IEEE JMEMS, 17, No 6, pp. 1481-1488, Dec 2008.
• Y. Li, W. Parkes, L.I. Haworth, A.A. Stokes, K.R. Muir, P. Li, A.J. Collin, N.G. Hutcheon, R. Henderson, B. Rae, A.J. Walton; "Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication", Solid-State Electronics, 52, No 9, pp. 1382-1387, September 2008.
  

  A droplet being moved by SAW (Surface Acoustic Wave) actuation. Increasing the driving power slightly results in the droplet being ejected from the surface. This technology is attractive for it's ability to both move and effectively mix droplets.

• Y. Li, Y. Mita, L.I Haworth, W. Parkes, M. Kubota, A.J. Walton; "Test Structure for Characterising Low Voltage Coplanar EWOD Systems", IEEE Transactions on Semiconductor Manufacturing, vol. 22, No 1, pp. 88-95, 2008.
• Y. Li, W. Parkes, L.I. Haworth, A.A. Stokes, K.R. Muir, P. Li, A.J. Collin, N.G. Hutcheon, R. Henderson, B. Rae, A.J. Walton; "Anodic Ta2O5 for CMOS Compatible Low Voltage Electrowetting-On-Dielectric Device Fabrication", ESSDERC, pp. 446-449, Sept 2007.
• Y. Li, P. Li, A Kazantzis, L.I. Haworth, A W S Ross, J G Terry, J T M Stevenson, A M Gundlach, A. Bunting, A.J. Walton; "Building EWOD microfluidic array technology on top of foundry CMOS", IET Seminar on MEMS Sensors and Actuators, pp. 25-30, 27-28 April 2006.
• A.A. Stokes, C. Galloway, Y. Li, W. Parkes, D. Dryden, A.J. Walton, P. Langridge-Smith, C.L. Mackay; "Development of Automated Protein Identification by nLC EWOD DESI FT-ICR ECD MS/MS", 56th ASMS Conference on Mass Spectrometry, 2008.
• Y. Li, W. Parkes, L.I. Haworth, A.A. Stokes, K.R. Muir, P. Li, A.J. Collin, N.G. Hutcheon, R. Henderson, B. Rae, A.J. Walton; "Anodic Ta2O5 for CMOS Compatible Low Voltage Electrowetting-On-Dielectric Device Fabrication", ESSDERC, pp. 446-449, Sept 2007.
• Y. Mita, Y. Li, M. Kubota, W. Parkes, L.I. Haworth, B.W. Flynn, J.G. Terry, A.D. Ruthven, S. Smith, A.J. Walton; "Demonstration of a Wireless Driven MEMS Pond Skater that uses EWOD Technology", Solid State Electronics, 27-28 April 2006.
• J.K. Luo, Y.Q. Fu, Y. Li, X.Y. Du, A.J. Flewitt, A.J. Walton, W.I. Milne; "Moving-part-free microfluidic systems for lab-on-a-chip", 2009.
• Y.Q. Fu, J.K. Luo, X.Y.Du, A.J. Flewitt, Y. Li, A.J. Walton, W.I. Milne; "Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications", Sensors & Actuators: B. Chemical, pTBA, 2009.

  MEMS/CMOS Integration

  

  A SPAD (Single Photon Avalanche Diode) Array showing how these sensitive optical detectors have the capability to be integrated with a CMOS backplane to drive EWOD electrodes

• H. Lin, J.T.M. Stevenson, A.M. Gundlach, C.C. Dunare, A.J. Walton; "Application of CMP for Integrating MEMS and CMOS Technology", 16th MME - MicroMechanics Europe Workshop, pp. 207-210, 2005.
• H. Lin, A.J. Walton, C.C. Dunare, J.T.M. Stevenson, A.M. Gundlach, S. Smith, A.S. Bunting; "Test Structures for the Characterisation of MEMS and CMOS Integration Technology", IEEE International Conference on Microelectronic Test Structures, pp. 143-148, March 2006.
• A.J. Walton; "Emerging Technology - A Glimpse of the Future", NMI Year Book 2008, pp. 31-35, Dec 2008.
• A.J. Walton, D.G. Vass, I. Underwood, G. Bodammer, D.W. Calton, K. Seunarine, J.T.M. Stevenson, A.M. Gundlach; "A Review of the History and Technology of Micromachined Miniature Displays Using Foundry Produced Silicon Backplanes", SPIE Electronics and Structures for MEMS, 3891, pp. 25-38, 27-29th October 1999.
• S. Smith, T.B. Tang, J.G. Terry, J.T.M. Stevenson, B.W. Flynn, H.M. Reekie, A.F. Murray, A.M. Gundlach, D. Renshaw, B. Dhillon, A. Ohtori, Y. Inoue, A.J. Walton; "Development of a miniaturised drug delivery system with wireless power transfer and communication", IET Nanobiotechnology, 1, No 5, pp. 80-86, October 2007.
• J.T.M. Stevenson, S. Smith, T.B. Tang, A.F. Murray, B.W. Flynn, H.M. Reekie, D.R. Renshaw, B. Dhillon, A. Ohtori, Y. Inoue, A.J. Walton; "Miniaturised MEMS drug delivery system with RF power transfer and communication", IET Seminar on MEMS Sensors and Actuators, pp. 157-162, 27-28 April 2006.
• T.B. Tang, S. Smith, B.W. Flynn, J.T.M. Stevenson, A.M. Gundlach, H.M. Reekie, A.F. Murray, D. Renshaw, B. Dhillon, A. Ohtori, Y. Inoue, J.G. Terry, A.J. Walton; "Implementation of a wireless power transfer and communications system for an implantable drug delivery system", 10th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences (Nanotech), 2 pages, 14-16th Nov 2006.
• T.B. Tang, S. Smith, B.W. Flynn, J.T.M. Stevenson, A.M. Gundlach, H.M. Reekie, A.F. Murray, D. Renshaw, B. Dhillon, A. Ohtori, Y. Inoue, J.G. Terry, A.J. Walton; "Implementation of wireless power transfer and communications for an implantable ocular drug delivery system", IET Nanobiotechnol., 2, No 3, pp. 72-79, 2008.

  Integration for Advanced Astronomical Detectors

  

  Gold interdigitated electrodes for EIS (Electrochemical Impedance Spectroscopy) bio-sensing system integration in a microfluidic flow cell.

• A.L.Woodcraft, P.A.R. Ade, D. Bintley, J.S. House, C.L. Hunt, R.V. Sudiwala, W.B. Doriese, W.B. Duncan, G.C. Hilton, K.D. Irwin, C.D. Reintsema, J.N. Ullom, C.C. Dunare, W. Parkes, A.J. Walton, J.B. Kycia, M. Halpern, E. Schulte; "Electrical and optical measurements on the first SCUBA-2 prototype 1280 pixel submillimetre superconducting bolometer array", Rev. Sci. Inst., 78, No 2, p024502, 2007.
• W.S. Holland, M. MacIntosh, A. Fairley, D. Kelly, D. Montgomery, D. Gostick, E. Atad-Ettedgui, M. Ellis, I. Robson, M. Hollister, A. Woodcraft, P. Ade, I. Walker, K. Irwin, G. Hilton, W. Duncan, C. Reintsema, A.J. Walton, W. Parkes, C.C. Dunare, M. Fich, J. Kycia, M. Halpern, D. Scott, A. Gibb, J. Molnar, E. Chapin, D. Bintley, S. Craig, T. Chylek, T. Jenness, F. Economou, G. Davis, J. Zmuidzinas, W.S. Holland, S. Withington, W.D. Duncan.(Ed); "SCUBA-2: a 10,000 pixel submillimeter camera for the James Clerk Maxwell Telescope", 2006.
• A.L. Woodcraft, M.I. Hollister, D.Bintley, M.A. Ellis, X. Gao, W.S. Holland, M.J. MacIntosh, P.A.R. Ade, J.S. House, C.L. Hunt, R.V. Sudiwala, W.D. Duncan, G.C. Hilton, K.D. Irwin, C.D. Reintsema, C.C. Dunare, W. Parkes, A.J. Walton, J.B. Kycia, M. Amiri, B. Burger, M. Halpern, J. Zmuidzinas, W.S. Holland, S. Withington, W.D. Duncan.(Ed); "Characterization of a prototype SCUBA-2 1280-pixel submillimetre superconducting bolometer array", 2006.
• W. Parkes, C.C. Dunare, A.J. Walton, J.G. Terry, J.T.M. Stevenson, A.S. Bunting, A.M. Gundlach, S. Smith, G.C. Hilton, K.D. Irwin, J.N. Ullom, W.D. Duncan, W.S. Holland, M.D. Audley, M.J. MaIntosh, M. Ellis, P.A.R Ade, R. Sudiwal, E. Schulte; "Design and fabrication of the SCUBA-2 detector for the JCM telescope", IEE Seminar on MEMS Sensor Technology, pp. 7, April 2005.
• A.J. Walton, W. Parkes, J.G. Terry, C.C. Dunare, J.T.M. Stevenson, A.M. Gundlach, S. Smith, G.C. Hilton, K.D. Irwin, J.N. Ullom, W.D. Duncan, W.S. Holland, M.D. Audley, H. McGregor, P.A.R. Ade, R.V. Sudiwala, A.L. Woodcraft, E. Schulte; "Prototype Detector Technology for the SCUBA-2 Sub-millimetre Bolometer Array", Journal of Nanoengineering and Nanosystems: Proc IMecE Part N, 219, pp. 11-21, 2005.
• W. Parkes, M.D. Audley, D. Bintley, H. McGregor, M. MacIntosh, A. Ruthven, R. Sudiwala, A.J. Walton; "Packaging the SCUBA-2 large sensor array for an astronomical Telescope", Microsystems Technology, pp. 463-470, 2005.
  

  An EWOD (ElectroWetting On Dielectric) electrode array moving a droplet. This technology can be combined with SAW actuation to create an extremely flexible digital microfluidics system.

• G.C Hilton, J.A. Beall, W.B. Doriese, W.D. Duncan, L.S. Ferreira, K.D. Irwin, C.D. Reintsema, J.N. Ullom, L.R. Vale, Y. Xu, B.L. Zink, W. Parkes, A.S. Bunting, C.C. Dunare, A.M. Gundlach, J.T. M. Stevenson, A.J. Walton, E. Schulte, E. Corrales, J.P. Sienicki, D. Bintley, P.A.R. Ade, R.V. Sudiwala, A.L. Woodcraft, M. Halpern, W.S. Holland, M.D. Audley, M. Macintosh; "Prototype imaging sub-arrays for SCUBA-2", American Institute of Physics Conference Proceedings, No , pTBD, 2005.
• W. Parkes, A.M. Gundlach, C. Dunare, J. Terry, J.T.M. Stevenson, A.J. Walton, E. Schulte; "Realization of a large area microbolometer sensor array for sub-millimeter astronomy applications: SCUBA-2", SPIE Conference on Astronomical Telescopes and Instrumentation, 5498, pp. 407-415, 21-25 June 2004.
• D. Audley, W.S. Holland, T. Hodson, M.J. MacIntosh, I. Robson, K.D. Irwin, G.C. Hilton, W.D. Duncan, W. Parkes, A.J. Walton, P. Ade, I. Walker, M. Fich, M. Halpern, D.A. Naylor, D. Mitcell, P. Bastien; "An update on the SCUBA-2 project", SPIE Conference on Astronomical Telescopes and Instrumentation (invited paper), 5498, pp. 63-77, 21-25 June 2004.
• M. D. Audley, W.D. Duncan, W.S. Holland, A.J. Walton, W. Parkes, C.C. Dunare, A.M. Gundlach, J.T.M. Stevenson, K.D. Irwin, G.C. Hilton, E. Schulte, P.A.R. Ade, C. Tucker; "Fabrication of the SCUBA-2 detector arrays", Nuclear Inst. and Methods in Physics Research, A, 520, pp. 483-486, 2004.
• M. D. Audley, W. S. Holland, W. D. Duncan, M. Cliffe, M. Ellis, X. Gao, T. Hodson, D. Kelly, M. J. MacIntosh, H. Macgregor, T. Peacocke, E.I. Robson, I. Smith, P. Hastings, K.D. Irwin, G.S. Hilton, J.N. Ullom, A.J. Walton, C.C. Dunare, W. Parkes, P.A.R. Ade, D. Bintley, F. Gannaway, M. Griffin, G. Pisano, R. Sudiwala, I. Walker, A. Woodcraft, M. Fitch, M. Halpern, G. Mitchell, D. Naylor, P. Bastien; "SCUBA-2: A Large Format TES Array for Submillimetre Astronomy", Nuclear Inst. and Methods in Physics Research, A, 520, pp. 479-483, 2004.
• M.D. Audley, W.S. Holland, M.J. MacIntosh, A.E. Fairley, E.I. Robson, K.D. Irwin, W.D. Duncan, A.J. Walton, P.A.R Ade, M. Fich, J. Kycia, M. Halpern, D. Naylor, G. Mitchell, P. Bastien; "Wide-field sub-millimetre imaging with SCUBA-2", American Astronomical Society Meeting, 205, p#181.02, 2004.
  

  A silicon based pressure sensor with polysilicon resistor bridge fabricated at the SMC (a collaboration with the Institute for System Level Integration)

• W. D. Duncan, M. D. Audley, W. S. Holland, D. Atkinson, T. Baillie, M. Cliffe, M. Ellis, X. Gao, T. Hodson, D. Kelly, M. J. MacIntosh, H. Macgregor, T. Peacocke, T. Smith, E.I. Robson, K.D. Irwin, G.S. Hilton, J.N. Ullom, C. Reintsema, L. Vale, W. Doriese, A.J. Walton, W. Parkes, C.C. Dunare, S. Smith, J.G. Terry, J.T.M. Stevenson, A.M. Gundlach, A.R. Ruthven, P.A.R. Ade, C. Tucker, F. Gannaway, I. Walker, R. Sudiwala, A. Woodcraft, E. Sculte, M. Fitch, J. Kycia, M. Halpern, J. Molar, B. Burger, D. Naylor, P. Bastien, C. Mitchell; "SCUBA-2: Arrays to Systems Interfaces", Nuclear Inst. and Methods in Physics Research, A, 520, pp. 427-430, 2004.
• A.J. Walton, W. Parkes, C.C. Dunare, J.T.M. Stevenson, A.M. Gundlach, G. Hilton, J.N. Ullom, K.D. Irwin, W.S. Holland, W.D. Duncan, M.D. Audley, P.A.R. Ade, R. Sudiwala, E. Schulte; "Design and fabrication of the detector technology for SCUBA-2", IEE Proceedings on Science, Measurement and Technology, 151, No 2, pp. 110-120, 2004.
• M. D. Audley, W. S. Holland, D. Atkinson, M. Cliffe, M. Ellis, X. Gao, D. Gostick, T. Hodson, D. Kelly, M. J. MacIntosh, H. Macgregor, E.I. Robson, T. Smith, K.D. Irwin, W. D. Duncan, W. Doriese, G.S. Hilton, C. Reintsema, J.N. Ullom, L. Vale, A.J. Walton, C.C. Dunare, W. Parkes, P.A.R. Ade, D. Bintley, F. Gannaway, C. Hunt, M. Griffin, G. Pisano, R.V. Sudiwala, I. Walker, A. Woodcraft, M. Fitch, M. Halpern, C. Mitchell, D. Naylor, J. Molar, P. Bastien; "SCUBA-2: CCD Style Imaging for the JCMT", Bulletin of the American Astronomical Society, No 203, p#40.02, Dec 2003.
• W.D. Duncan, W.S. Holland, M.D. Audley, M. Cliffe, T. Hodson, B.D. Kelly, X. Gao, D. Gostick, M. MacIntosh, H. McGregor, T. Peacocke, K.D. Irwin, G. Hilton, S. Deiker, J. Beier, C. Reintsema, A.J. Walton, W. Parkes, J.T.M. Stevenson, A.M. Gundlach, C.C. Dunare, P.A.R. Ade, T.G. Phillips, J. Zmuidzinas(Ed); "SCUBA-2: Developing the detectors", SPIE Millimeter and Submillimeter Detectors for Astronomy, 4855, pp. 19-29, 2003.
• W. S. Holland, W. D. Duncan, M. D. Audley, M. Cliffe, X. Gao, D. Gostick, T. Hodson, D. Kelly, M. J. MacIntosh, H. Macgregor, T. Peaacocke, T. Smith, E.I. Robson, K.D. Irwin, G.S. Hilton, J.N. Ullom, A.J. Walton, W. Parkes, C.C. Dunare, P.A.R. Ade, M. Fitch; "Realising CCD Style imaging in the submillimeter", Bulletin of the American Astronomical Society, 34, p1302, Dec 2002.
• W.S. Holland, W.D. Duncan, K.D. Irwin, A.J. Walton, P.A.R. Ade, E.I. Robson, T.G. Phillips, J. Zmuidzinas(Ed); "SCUBA-2: SCUBA-2: a large-format submillimeter camera on the James Clerk Maxwell Telescope", SPIE Millimeter and Submillimeter Detectors for Astronomy, 4855, pp. 1-18, 2003.
  

  pH sensor using chemically sensitive field effect transistors

• W.D. Duncan, W.S. Holland, D. Audley, D. Kelly, T. Peacocke, P. Hastings, M. MacIntosh, K.D. Irwin, S.W. Nam, G. Hilton, S. Deiker, A.J. Walton, A.M. Gundlach, W. Parkes, C.C. Dunare, P.A.R. Ade, E.I. Robson; "SCUBA-2 : Application of LTD technology", American Institute of Physics Conference Proceedings, No 605, pp. 577-580, 2002.
• W.S. Holland, W.D. Duncan, M.D. Audley, B.D. Kelly, T. Peacocke, M. MacIntosh, T. Hodson, K.D. Irwin, G. Hilton, A.J. Walton, A.M. Gundlach, P.A.R. Ade, E.I. Robson; "SCUBA-2: A new generation submillimeter imager for the James Clerk Maxwell Telescope", Bulletin of the American Astronomical Society, 33, p1468, Dec 2001.
• W.D. Duncan, W.S. Holland, D. Audley, D. Kelly, T. Peacocke, P. Hastings, M. MacIntosh, K.D. Irwin, S.W. Nam, G. Hilton, S. Deiker, A.J. Walton, A.M. Gundlach, W. Parkes, C.C. Dunare, P.A.R. Ade, E.I. Robson; "Unveiling the submm Universe: SCUBA-2 the next generation camera for the James Clerk Maxwell Telescope", Proceedings of the 26th International Conference on Infrared and Millimeter Waves, pp. 1-21, 2001, ISBN 2-87649-035-B.
• G.C. Hilton, J.A. Beall, W.B. Doriese, W.D. Duncan, L.S. Ferreira, K.D. Irwin, C.D. Reintsema, J.N. Ullom, L.R. Vale, Y. Xu, B.L. Zink, W. Parkes, A.S. Bunting, C.C. Dunare, A.M. Gundlach, J.T.M. Stevenson, A.J. Walton, E. Schulte, E. Corrales, J.P. Sienicki, D. Bintley, P.A.R. Ade, R.V. Sudiwala, A.L. Woodcraft, M. Halpern, W. Holland, M.D. Audley, M. MacIntosh; "Fabrication of prototype imaging arrays for SCUBA-2", Nuclear Instruments & Methods in Physics Research, Section A (Accelerators, Spectrometers, Detectors and Associated Equipment), 2001.

  Silicon Carbide Microsystems

  

  Micro-cantilever structures fabricated in silicon carbide

• R. Cheung, P. Argyrakis; "Micro-scale Sensors based in Silicon Carbide and Silicon", Proceedings of the Institution of Mechanical Engineers, Part C, Journal of Mechanical Engineering Science, 19-26, 2008
• E. Mastropaolo, R. Cheung; "Electrothermal actuation studies on Silicon Carbide resonators", Journal of Vacuum Science and Technology B, 2008
• S. Enderling, J. Hedley, L. Jiang, R. Cheung, C.A. Zorman, M. Mehregany, A.J. Walton; "Characterisation of frequency tuning using focused ion beam platinum deposition", Journal of Micromechanics and Microengineering, 17, 1-7, 2007
• M. Pozzi, M. Hassan, A.J. Harris, J.S. Burdess, K.K. Lee, R. Cheung, C.A. Zorman, M. Mehregany; "Mechanical properties of a 3C-SiC layer between RT and 600 ºC", Journal of Physics D; Applied Physics, 40, 3335-3342, 2007
• S. Anderson, L. Jiang, R. Cheung, C.A. Zorman, M. Mehregany; "Fabrication of Hall Device Structures in 3C-SiC using Micro-electro-mechanical Processing Technology", Microelectronic Engineering, 83, 1396-1399, 2006
• L. Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S. Burdess, C.A. Zorman, M. Mehregany; "SiC cantilever resonators with electrothermal actuation", Sensors and Actuators A, 128, 376-386, 2006
• P. Argyrakis, A.J. Snell, R. Cheung; "Relaxation of process-induced surface stress in amorphous silicon carbide thin films using low energy ion bombardment", Applied Physics Letters, 89, 034101-1-3, 2006
  

  MEMS pressure sensor farbicated in silicon carbide for use in harsh environments

• L. Jiang, M. Hassan, R. Cheung, A.J. Harris, J.S. Burdess, C.A. Zorman, M. Mehregany; "Dry release fabrication and testing of SiC electrostatic cantilever actuators", Microelectronic Engineering, 78-79, 106-111, 2005
• L. Jiang, R. Cheung; "Impact of Ar addition to inductively coupled plasma etching of SiC in SF6/O2", Microelectronic Engineering, 73-74, 306-311, 2004
• L. Jiang, N.O.V. Plank, R. Cheung, M.A. Blauw, E. van der Drift; "Dry etching of SiC in inductively coupled Cl2/Ar plasma", Journal of Physics D; Applied Physics, 37, 1809-1814, 2004
• N.O.V. Plank, M.A. Blauw, E. van der Drift, R. Cheung; "The etching of silicon carbide in inductively coupled SF6/O2 plasma", Journal of Physics D; Applied Physics, 36, 482-487, 2003
• L. Jiang, R. Cheung, R. Brown, A. Mount; "Inductively coupled plasma etching of SiC in SF6/O2 and etch-induced surface chemical bonding modifications", Journal of Applied Physics, 93, 1376-1383, 2003
• L. Jiang, R. Cheung, M. Hassan, A.J. Harris, J.S. Burdess, C.A. Zorman, M. Mehregany; "Fabrication of SiC micro-electro-mechanical systems (MEMS) using one-step dry etching", Journal of Vacuum Science and Technology, B21, 2998-3002, 2003

  Biomedical Microsystems

• H. Schulze, G. Giraud, T.T. Bachmann, C.J. Campbell, A.R. Mount, P. Ghazal, M. Khondoker, S.W.J Ember, I. Ciani, C. Tlili, A.J Walton, J.G. Terry, J. Crain; "Solution state hybridization detection using time-resolved fluorescence anisotropy of quantum dot-DNA bioconjugates", Chemical Physics Letters, 484, pp. 309-314, 2010.
• C.J. Campbell, C.P. Mountford, H.C. Stoquert, A.H. Buck, P.Dickinson, E. Ferapontova, J.G. Terry, J.S. Beattie, A.J. Walton, J. Crain, P. Ghazal, A.R. Mount; "A DNA nanoswitch incorporating the fluorescent base analogue 2-amino purine detects single nucleotide mismatches in unlabelled targets", The Analyst, 134, No 9, pp. 1873-1879, Sept 2009.
• G. Giraud, H. Schulze, T.T. Bachmann, C.J. Campbell, A.R. Mount, P. Ghazal, M.R. Khondoker, A.J. Ross, S.W.J. Ember, I. Ciani, C. Tlili, A.J. Walton, J.G. Terry, J. Crain; "Fluorescence Lifetime Imaging of Quantum Dot Labeled DNA Microarrays", International Journal of Molecular Sciences, 10, No 4, pp. 1930-1941, 2009.
• C.P. Mountford, A.H. Buck, C.J. Campbell, P. Dickinson, E.E. Ferapontova, J.G. Terry, J.S. Beattie, A.J. Walton, P. Ghazal, J. Crain, A.R. Mount; "Probing the effect of target mismatches on DNA folding using Fluorescence lifetime analysis", submitted to Chem Phys Chem, pTBA, 2009.
• E.E. Feraponmatova, A.H. Buck, C.P. Mountford, J. Crain, J.G. Terry, A.J. Walton, P. Dickinson, C.J. Campbell, J.S. Beattie, P. Ghazal, A.R. Mount; "Electrochemical control of a DNA Holliday Junction by Mg2+ ions", Biosens Bioelectron, 24, No 3, pp. 422-8, Nov 2008.
• C.P. Mountford, A.H. Buck, C.J. Campbell, P. Dickinson, E.E. Ferapontova, J.G. Terry, J.S. Beattie, A.J. Walton, P.Ghazal, A.R. Mount, J. Crain; "Molecular recognition with DNA nanoswitches: Effects of single base mutations on structure", J. Phys. Chem. B, 112, No 8, pp. 2439 -2444, Feb 2008.
• E.E. Feraponmatova, A.H. Buck, C.P. Mountford, J. Crain, J.G. Terry, A.J. Walton, P. Dickinson, C.J. Campbell, J.S. Beattie, P. Ghazal, A.R. Mount; "Electrochemical control of switching of a DNA Holliday Junction", Bioelectrochemical Society meeting, p47, April 2007.
• E.E. Ferapontova, A.H. Buck, P. Dickinson, C.P. Mountford, J. Crain, J.G. Terry, A.J. Walton, C.J. Campbell, J.S. Beattie, P. Ghazal, A.R. Mount; "Electrochemical modulation of a conformational DNA nanoswitch by Mg2+ released from the oxidised poly(N-methylpyrrole)/polyacrylate film", Bioelectrochemistry, pTBA, 2007.
• E.E. Ferapontova, J.G. Terry, A.J. Walton, C.P. Mountford, J. Crain, A.H. Buck, P. Dickinson, C.J. Campbell, J.S. Beattie, P. Ghazal, A.R. Mount; "Electrochemical deposition of Zn on TiN microelectrode arrays for microanodes", Electrochem Comms, 9, pp. 303-9, 2007.
• A.H. Buck, C.J. Campbell, P. Dickinson, C.P. Mountford, H.C. Stoquert, J.G. Terry, S.A G. Evans, L.M. Keane, T.J Su, A.R. Mount, A.J. Walton, J.S. Beattie, J.Crain, P.Ghazal; "DNA Nanoswitch as a Biosensor", Anal. Chem., 79, No 12, pp. 4724-8, 2007.
• C.P. Mountford, A.R. Mount, S.A.G. Evans, T.J. Su, P. Dickinson, A.H. Buck, C.J. Campbell, J.G. Terry, J.S. Beattie, A.J. Walton, P. Ghazal, J. Crain; "Time-Resolved FRET and FLIM of Four-way DNA Junctions", Journal of Fluorescence, 16, No 6, pp. 839-45, Nov 2006.
• J.G. Terry, C.J. Campbell, A.J. Ross, A.D. Livingston, A.H. Buck, P. Dickinson, C.P. Mountford, S.A.G. Evans, A.R. Mount, J.S. Beattie, J. Crain, P. Ghazal, A.J.Walton; "Improved silicon nitride surfaces for next generation microarrays", Langmuir, 22, No 26, pp. 11400-11404, December 19th 2006. Click for pdf copy
• A.R. Mount, C.P. Mountford, S.A.G. Evans, T-J Su, A.H. Buck, P. Dickinson, J.G. Terry, C.J. Campbell, L.M. Keane, J.S. Beattie, A.J. Walton, P.Ghazal, J. Crain; "The Stability and Characteristics of a DNA Holliday Junction Switch", Biophysical Chemistry, 124, No 3, pp. 214-221, Dec 2006.
• P. Dickinson, C.J. Campbell, S.A.G. Evans, A.H. Buck, C.P. Mountford, L.M. Keane, J.G. Terry, T.J. Su, A.R. Mount, A.J. Walton, J.S. Beattie, J. Crain, P. Ghazal; "Positional characteristics of fluorophores influencing signal output of a DNA nanoswitch", Bio Micro and Nanosystems Conference, pp. 3-6, 2006.
• J.S. Beattie, C.J. Campbell, J Crain, P.Dickinson, S.A.G Evans, P. Ghazal, L.Keane, S. Magennis, A.R. Mount, C. Mountford, T-J Su, J.G. Terry, A.J. Walton; "Interdisciplinary Integrated Research Teams in an Academic Environment", IEEE International Engineering Management Conference, Proceedings, pp. 328-332, 2005.
• S.A.G. Evans, J.G. Terry, N.O.V. Plank, A.J. Walton, L.M. Keane, C.J. Campbell, P.Ghazal, J.S. Beattie, T-J Su, J. Crain, A.R. Mount; "Electrodeposition of platinum metal on TiN thin films", Electrochemical Communications, pp. 125-129, 2005.
• A.J. Walton, J.G. Terry, A.W.S Ross, S. Smith, A. Bunting, J.T.M. Stevenson, L. Peng, S.A.G. Evans, A.R. Mount, T-J. Su, J. Crain, L.M. Keane, C.J. Campbell, J.S. Beattie, P. Ghazal; "Integrating Micro and Nanotechnology with the Bio World", NanoMed 2004 - 4th International Workshop on Biomedical Applications of Nanotechnology, pp. 5-8, 14-15th Oct, 2004.
• A.J. Walton, J.G. Terry, A.W.S Ross, S. Smith, A. Bunting, J.T.M. Stevenson, L. Peng, S.A.G. Evans, A.R. Mount, T-J. Sub, J. Crain, L.M. Keane, C.J. Campbell, J.S. Beattie, P. Ghazal; "Integrating Micro and Nanotechnology with the Bio World", NanoMed 2004 - 4th International Workshop on Biomedical Applications of Nanotechnology, pp. 5-8, 14-15th Oct, 2004.

  Microsystems Design and Fabrication

  

  Copper via structure electroplated through a 200µm thick silicon wafer for advanced interconnect and packaging

  Microsystems Packaging

  

  Array of micro LED devices driven by an integrated CMOS based SPAD detector chip <\div>

Copyright © SMC

SMC - Delivering Innovation through R&D