Institute for Integrated Micro and Nano Systems (IMNS)

The Institute for Integrated Micro and Nano Systems brings together researchers from integrated circuit design, system-on-chip design, microfabrication, micro-electro mechanical systems (MEMS), micro-machining and neural computation. Research activities range from industrially-focussed process development and low-power system-on-chip design to long-term research into circuit design, system architectures, SPAD arrays, microdisplays and novel structures on silicon. In the latter context, strong links to the life sciences exist and thus "bio-electronics" and "bio-mechanics" (orthopaedic engineering), in several forms, now provide an area of rapid growth that links the core activities within the Institute. The Institute's facilities include a substantial design and test resource, a comprehensive silicon and MEMS fabrication capability which is based at the Scottish Microelectronics Centre (SMC). In addition to the extensive micro/nano fabrication equipment toolset the SMC also houses analytical equipment with SEM, AFM and FIB equipment for chip visualisation and repair as well as XRF and stress measurement tools.

The IMNS is a core partner of the Institute for Integrated Systems (IIS), one of five joint research institutes in the Edinburgh Research Partnership in Engineering and Mathematics (ERPEM). This creates synergy between existing teams with established international reputations building ‘towers of excellence’ in astronomy and space technology, bio-photonic and bio-electronic systems, high-value manufacturing technologies, miniature-system integration and advanced photonic devices and systems. IIS staff are internationally-recognised researchers in innovative, low-power VLSI design, novel computational paradigms, advanced silicon device fabrication, optical science and technology, photonics devices and systems (including sensors, lasers and displays), micro-electro-mechanical systems (MEMS), micro-machining, laser-based processing and ultrafast/nano-optics. The partnership consists of the UK Astronomy Technology Centre (ROE Edinburgh), the Institute for Integrated Micro and Nano Systems (UoE) and the School of Engineering and Physical Sciences (HW). The partners have complementary skills and technology capabilities, which provides the IIS with opportunities to address research topics that would not be possible on an individual basis.

IMNS News, Studentships and Job Opportunities

SMC 10 Year Report is now available

Research Activities 

Facilities/Commercial Services 

Institute for Integrated Systems

IMNS Postgraduate Research information

Internal IMNS Web pages

SMC Cleanrooms 

Bio-chip, bonded and packaged

Scottish Microelectrons Centre : Cleanrooms

On-chip MEMS membrane

Head of Institute: Professor Ian Underwood

Institute Administrator: Diane Reid


Institute for Integrated Micro and Nano Systems, The University of Edinburgh, Kings Buildings, Mayfield Road, Edinburgh, EH9 3JL
Tel: 0131 650 5645      Fax: 0131 650 6544      Email :IMNS Administrator

Originally designed by The Learning Technology Section    © 2002 Copyright The University of Edinburgh. All rights reserved.

Last modified Thursday, 16-Jun-2010 17:15:13 BST