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Institute for Integrated
Micro and Nano Systems (IMNS)
The Institute for Integrated Micro and Nano Systems brings together
researchers from integrated circuit design, system-on-chip design,
microfabrication, micro-electro mechanical systems (MEMS), micro-machining
and neural computation. Research activities range from
industrially-focussed process development and low-power system-on-chip design to long-term
research into circuit design, system architectures, SPAD arrays, microdisplays
and novel structures on silicon. In the latter context, strong links to the
life sciences exist and thus "bio-electronics" and
"bio-mechanics" (orthopaedic engineering), in several forms, now
provide an area of rapid growth that links the core activities within the Institute.
The Institute's facilities include a substantial design and test resource,
a comprehensive silicon and MEMS fabrication capability which is based at
the Scottish Microelectronics Centre (SMC). In addition to the extensive
micro/nano fabrication equipment toolset the SMC also houses
analytical equipment with SEM, AFM and FIB
equipment for chip visualisation and repair as well as XRF and stress measurement tools.
The IMNS is a core partner of the
Institute for Integrated Systems
(IIS), one of five joint research institutes in the Edinburgh Research
Partnership in Engineering and Mathematics (ERPEM). This creates
synergy between existing teams with established international
reputations building ‘towers of excellence’ in astronomy
and space technology, bio-photonic and bio-electronic systems,
high-value manufacturing technologies, miniature-system integration and
advanced photonic devices and systems. IIS staff are
internationally-recognised researchers in innovative, low-power VLSI
design, novel computational paradigms, advanced silicon device
fabrication, optical science and technology, photonics devices and
systems (including sensors, lasers and displays),
micro-electro-mechanical systems (MEMS), micro-machining, laser-based
processing and ultrafast/nano-optics. The partnership consists of the
UK Astronomy Technology Centre (ROE Edinburgh), the Institute for
Integrated Micro and Nano Systems (UoE) and the School of Engineering
and Physical Sciences (HW). The partners have complementary skills and
technology capabilities, which provides the IIS with opportunities to
address research topics that would not be possible on an individual
basis.
Research
Activities
IC Design/System-Level Integration
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Micro and Nano Fabrication
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Facilities/Commercial
Services
SMC Cleanrooms
Head of Institute: Professor Ian Underwood
Institute Administrator: Diane Reid
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